SELECTIVE LASER ETCHING

Selective laser etching is a two-step process. First, the volume of glass or sapphire is modified by ultra-short radiation, then the material is chemically etched away. In this way mechanically stable and durable structures can be created.

Examples


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3D nozzle
For high pressured gases with variable diameter in micro scale (narrowest channel – up to a few micrometers)
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Array of blind micro holes in fused silica
The surrounded material in not thermally affected resulting in clear and vertical edges with no mechanical defects, the holes are without a taper. Doi.org/10.1117/12.2286906
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Array of hexagon shaped holes
Micro-holes in 500 µm thickness fused silica. Overall size of such array can be up to 16 cm x 16 cm.
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Free movable ball chain
3D structure of fused silica – movable joint-like connections
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Geneva mechanism
Movable 3D structure of fused silica.
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Micro-mechanical parts
Mechanically rigid and transparent in the spectrum range from UV to IR